NE 732 Principles of Industrial Plasmas

3 Credit Hours

Theory and fundamental physical principles of industrial plasmas. Applications in plasma processing, plasma manufacturing technology, plasma-driven devices and plasma-aided technology. Emphasis on particle transport and plasma flow.

Prerequisite

Introduction to Plasma Physics and Fusion Energy (NC State NE/PY 528) or equivalent.

Course Requirements

Two midterms (30% each) and one final exam (40%). The first midterm will be a conference-style poster presentation, the second midterm a conference-style oral presentation, both about a publication related to the topics discussed in class. The final exam will be a written report about an assigned publication.

Course Topics

• Basic plasma phenomena
• Heating mechanisms
• Sheath dynamics
• Basic plasma chemistry
• Plasma reactor design considerations
• How plasmas are used for material modifications, including:
  • Etching, Deposition, Implantation, Nitridation

Textbook

Optional: Michael A. Lieberman and Allan J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, John Wiley & Sons Inc.

Updated: 11/16/2021