Dr. Katharina Stapelmann
NE 732 Principles of Industrial Plasmas
3 Credit Hours
Theory and fundamental physical principles of industrial plasmas. Applications in plasma processing, plasma manufacturing technology, plasma-driven devices and plasma-aided technology. Emphasis on particle transport and plasma flow.
Two midterms (30% each) and one final exam (40%). The first midterm will be a conference-style poster presentation, the second midterm a conference-style oral presentation, both about a publication related to the topics discussed in class. The final exam will be a written report about an assigned publication.
- Basic plasma phenomena
- Heating mechanisms
- Sheath dynamics
- Basic plasma chemistry
- Plasma reactor design considerations
- How plasmas are used for material modifications, including:
- Etching, Deposition, Implantation, Nitridation
Optional: Michael A. Lieberman and Allan J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, John Wiley & Sons Inc.
Computer and Software Requirements
Please review minimum computer specifications recommended by NC State University and Engineering Online.