Dr. Yong Zhu

Mechanical and Aerospace Engineering

Phone: 919-513-7735
Instructor Website
Research Website

MAE 536 Micro/Nano Electromechanical Systems

3 Credit Hours

Fundamentals and applications of micro/nano sensors and actuators. Emphasis upon MEMS/NEMS design, microfabrication techniques, and case studies of typical MEMS devices. It also covers the recent progress in nanomaterials and NEMS devices.

Syllabus Lecture Videos Lecture Notes Course Website