Dr. Spyridon Pavlidis

Electrical and Computer Engineering

Coming Soon

ECE 568 Conventional & Emerging Nanomanufacturing Techniques and Applications in Nanosystems

3 Credit Hours

(also offered as CHE 568)

This course studies the conventional and emerging nano-manufacturing techniques and their applications in the fabrication of various structures and devices. The first part of the course reviews various micro and nano manufacturing techniques for patterning, deposition, and etching of thin films including emerging techniques such as an imprint and soft lithography and other unconventional techniques. After the review of the manufacturing techniques, basic electronic and mechanical properties of thin films and nanostructures and their applications in nano-electronics, MEMS/NEMS devices, sensing, and energy harvesting will be discussed. The current state-of-the-art CMOS technology platform and system integration including flexible electronics are discussed. Credit for both ECE/CHE 468 and ECE/CHE 568 is not allowed.

Syllabus Lecture Videos Lecture Notes Course Website